Rotary tool for boat of semiconductor manufacturing apparatus



FIG. 1 is a perspective view of a rotary tool for boat of semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 6 thereof.

The broken lines show portions of a rotary tool for boat of semiconductor manufacturing apparatus which form no part of the claimed design.

The “dash-dot” broken lines define the bounds of the claim and form no part thereof. 

CLAIM We claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown (and described). 